JPH0244827Y2 - - Google Patents
Info
- Publication number
- JPH0244827Y2 JPH0244827Y2 JP12839286U JP12839286U JPH0244827Y2 JP H0244827 Y2 JPH0244827 Y2 JP H0244827Y2 JP 12839286 U JP12839286 U JP 12839286U JP 12839286 U JP12839286 U JP 12839286U JP H0244827 Y2 JPH0244827 Y2 JP H0244827Y2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- air
- suction port
- attached
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 description 6
- 238000009423 ventilation Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000005553 drilling Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12839286U JPH0244827Y2 (en]) | 1986-08-22 | 1986-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12839286U JPH0244827Y2 (en]) | 1986-08-22 | 1986-08-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6335415U JPS6335415U (en]) | 1988-03-07 |
| JPH0244827Y2 true JPH0244827Y2 (en]) | 1990-11-28 |
Family
ID=31024018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12839286U Expired JPH0244827Y2 (en]) | 1986-08-22 | 1986-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0244827Y2 (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0532168Y2 (en]) * | 1988-08-05 | 1993-08-18 | ||
| JP5433361B2 (ja) * | 2009-09-28 | 2014-03-05 | 高砂熱学工業株式会社 | ファンフィルタユニットの取り付け構造 |
| JP6284806B2 (ja) * | 2014-03-31 | 2018-02-28 | 日本無機株式会社 | フィルタエレメント、フィルタエレメント組立体、および空気清浄システム |
-
1986
- 1986-08-22 JP JP12839286U patent/JPH0244827Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6335415U (en]) | 1988-03-07 |
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